Solid State Electronic Devices
Multilevel copper metallization of a complementary metal oxide semiconductor (CMOS) chip. This scanning electron micrograph (scale: 1 cm = 3.5 microns) of a CMOS integrated circuit shows six levels of copper metallization that are used to carry electrical signals on the chip. The inter-metal dielectric insulators have been chemically etched away here to reveal the copper interconnects. (Photograph courtesy of IBM.)
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