Microactuators
Design and Technology
Abstract
Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three actuation principles and characteristics are briefly explained to highlight the motivation behind the selection of different microactuators. Various design models of electrostatic, piezoelectric, and electrothermal microactuators are described and compared from the perspective of ...
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