Smart Sensors and MEMS, 2nd Edition

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What makes sensor devices and microsystems “intelligent” or “smart”?

Roald Taymanov, and Kseniia Sapozhnikova     D.I. Mendeleyev Institute for Metrology, Saint Petersburg, Russia

Abstract

This chapter demonstrates how the technological progress has resulted in complication of sensors and microelectromechanical systems, formation of the elements of artificial intelligence in them, as well as enhancement of functional possibilities. However, many terms and definitions applied for describing such devices are ambiguous, which complicates communication between specialists, makes the search for required information more difficult, and becomes, in the long run, an obstacle to the development of metrology and measuring techniques. The authors propose ...