Capacitive sensors
Abstract
This chapter starts with resuming the notions capacitance and permittivity. Next, we discuss basic configurations for capacitive sensors. The capacitance value changes with variation in the geometry. The focus is mainly on linear and angular displacement sensors and on force sensors. Next, integrated silicon capacitive sensors are briefly reviewed and some interface circuits are given to measure small capacitance changes. This chapter ends with examples of particular measurement problems where a capacitive sensor forms a suitable solution.
Keywords
Permittivity; capacitance; flat-plate capacitive displacement sensor; silicon capacitive sensors; interfacing; LVDC; level sensors; applications
Capacitive sensors for displacement ...
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