Much fundamental research, technologies, and applications are now moving toward achieving high-precision positioning and higher specifications in production, thus achievable with the requirements of precision motion control up to the order of the submicrometer or nanometer level. This is driven by the emergence of current technologies, such as high-precision manufacturing processes, machines, biotechnology, and nanotechnology. From the early 1980s, semiconductor and biomedical industries demanded high-precision actuators to execute more precise positioning and manufacturing in their processes, and the move toward ever-higher precision has continued to now. Requirements pertaining to the precision of motion vary substantially. As such, ...
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