Modeling and Control of Precision Actuators

Contents

Preface

Acknowledgments

About the Authors

1.  Introduction

1.1  Growing Interest in Precise Actuators

1.2  Types of Precise Actuators

1.2.1  Piezoelectric Actuator

1.2.1.1  Stack Actuator

1.2.1.2  Piezoelectric Shear Actuator

1.2.1.3  Piezoelectric Bending Actuator

1.2.2  Linear Motor

1.2.2.1  Permanent Magnet Linear Motor

1.2.2.2  Linear Piezo Stage

1.2.2.3  Linear Air Bearing Stage

1.3  Applications of Precise Actuators

References

2.  Nonlinear Dynamics and Modeling

2.1  Hysteresis

2.2  Creep

2.3  Friction

2.4  Force Ripples

References

3.  Identification and Compensation of Preisach Hysteresis in Piezoelectric Actuators

3.1  SVD-Based Identification and Compensation of Preisach Hysteresis

3.1.1  Parameter Identification of Preisach ...