PART V
Micromanufacturing and Fabrication of Microelectronic Devices
The importance of the topics covered in the following two chapters can best be appreciated by considering manufacturing of a simple metal spur gear. It is important to also recall that some gears are designed to transmit power, such as those in gear boxes, and others transmit motion, such as in clocks. If the gear is, say, 100 mm in diameter, it can be produced by traditional methods, such as starting with a cast or forged blank, and machining and grinding it to its final shape and dimensions.
On the other hand, if a gear is only 2 mm in diameter, it can be difficult to produce by these methods; if sufficiently thin, the gear could be made from sheet metal, by fine blanking, ...
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