Laser-based micro- and nano-fabrication of photonic structures
V. Schmidt, Joanneum Research, Austria
Abstract:
The development of photonic micro-systems requires advanced and robust lithographic methods, which enable the reliable fabrication of intricate, high-quality, three-dimensional (3D) structures at high spatial resolution. In this context, the laser is presented as a versatile tool for fabrication and rapid prototyping beyond the limitations of earlier methods. Supported by the growing availability of tailored and efficient photo-sensitive materials, laser lithography builds specially designed multidimensional photonic micro- and nano-structures for emerging M(O)EMS/N(O)EMS applications. Laser-based fabrication methods for two-dimensional ...
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