7 Power IC Process Flow with TCAD Simulation
Before we explore the integrated power devices, it is always better to prepare the reader with some knowledge of how the power devices are fabricated in a smart power IC technology.
7.1 Overview
While all real process technologies are proprietary, in this chapter, we will present a mock-up process flow with step-by-step technology computer-aided design (TCAD) simulations. This process simulation follows a published [178] 0.18 µm smart power IC flowchart with some modifications. The corresponding process conditions (e.g., implant dose, energy) are arbitrary and not optimized for any real device applications. The purpose of this chapter is to help familiarize the reader with typical process flows and ...
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