References
1. Annovazzi-Lodi V., Merlo S., Norgia M., Characterization of silicon microstructures by feedback interferometry J. Opt. A: Pure Appl. Opt. 4 6 2002, S311-S317
2. Bosseboeuf A., Petitgrand S., Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends J. Micromech. Microeng. 13 4 2003, S23-S33
3. van Spengen W.M., Puers R., Mertens R., De Wolf I., Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations Microsyst. Technol. 10 2 2004, 89-96
4. Sinclair M.B., de Boer M.P., Corwin A.D., Long-working-distance incoherent-light interference microscope Appl. Opt. 44 36 2005, 7714-7721
5. Davis C.Q.,
Get Handbook of Silicon Based MEMS Materials and Technologies now with the O’Reilly learning platform.
O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.