References

1. Annovazzi-Lodi V., Merlo S., Norgia M., Characterization of silicon microstructures by feedback interferometry J. Opt. A: Pure Appl. Opt. 4 6 2002, S311-S317

2. Bosseboeuf A., Petitgrand S., Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends J. Micromech. Microeng. 13 4 2003, S23-S33

3. van Spengen W.M., Puers R., Mertens R., De Wolf I., Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations Microsyst. Technol. 10 2 2004, 89-96

4. Sinclair M.B., de Boer M.P., Corwin A.D., Long-working-distance incoherent-light interference microscope Appl. Opt. 44 36 2005, 7714-7721

5. Davis C.Q.,

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