Handbook of Silicon Based MEMS Materials and Technologies

Chapter Two. Czochralski Growth of Silicon Crystals

Czochralski (CZ) growth of silicon has been named after the Polish scientist Jan Czochralski, who in 1918 published his report on the growth of single-crystal metal filaments from melt [1]. The present method is largely attributable to Teal and Little and dates back to the early 1950s when it was not yet clear whether single-crystal semiconductor material would have any significant advantage over polycrystalline materials and the material of choice was germanium more often than silicon [2–4]. The differences in the method developed by Teal and Little were so large compared with the original method by Czochralski that it would probably be more just to call it the Teal–Little method [4]. The existence ...