Preface
In summer 2006 we were approached by William Andrew Publishing about producing a MEMS related handbook. As the general guideline from the publisher was to keep in mind that they are particularly seeking book content geared towards practical applications rather than theory.
During the summer of 2006 we matured our understanding of the state-of-art as well as the further development and needs of MEMS materials and technologies. As a result of such a maturation process, we understood that there are currently many handbooks and textbooks covering MEMS components, but their focus is more in the device physics and design rather than in materials and manufacturing processes. Also, it has been experienced in practice, that there is a need for ...
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