RF MEMS technology for next-generation wireless communications
F. Giacomzzi and J. Iannacci, Fondazione Bruno Kessler, Italy
Abstract:
This chapter discusses the use of microelectromechanical systems (MEMS) technology for the realization of next-generation microwave devices for wireless communications. This technology allows the fabrication of both improved performance lumped elements and newer tunable or reconfigurable complex networks, adding extra functionality in modern wireless systems. After an overview, the salient technological features of lumped element components, such as ohmic and capacitive switches, as well as variable capacitors and inductors, are presented. A technological platform for the fabrication of complex networks ...
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