References

  • 1. Semiconductor Equipment and Materials International (SEMI). (2004). SEMI E10–0304 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM). SEMI E10 Revision Task Force, San Jose, CA.
  • 2. Campbell, John Dixon. (1995). Uptime Strategies for Excellence in Maintenance Management. Portland, OR: Productivity Press.
  • 3. Moubray, John. (1999). Reliability-Centered Maintenance. 2nd ed. Oxford, UK: Butterworth-Heinemann.
  • 4. Levitt, Joel. (1997, March). Handbook of Maintenance Management. New York: Industrial Press.
  • 5. Nakajima, Seiichi. (1988). Introduction to TPM: Total Productive Maintenance. New York, NY: Productivity Press.
  • 6. Nakajima, Seiichi. (1989). TPM Development Program: Implementing ...

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