Epitaxial Growth of Complex Metal Oxides

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Chemical solution deposition techniques for epitaxial growth of complex oxides

J.E. ten Elshof     MESA+ Institute for Nanotechnology, University of Twente, Enschede, Netherlands

Abstract

The chemical solution deposition (CSD) process is a wet-chemical process that is employed to fabricate a wide variety of amorphous and crystalline oxide thin films. This chapter describes the typical steps in a CSD process and their influence on the final microstructure and properties of films, and provides an overview of the different types of CSD processes. Some examples of CSD-derived oxide films are discussed.

Keywords

Chemical solution deposition (CSD); Epitaxial films; Metal-organic decomposition (MOD); Oxide; Sol–gel process

4.1. Introduction

The chemical solution ...