Metal-Oxide-Semiconductor System
The metal-oxide-semiconductor (MOS) structure, commonly referred to as the MOS capacitor, is a two-terminal device with one electrode connected to the metal and the other electrode connected to the semiconductor, forming a voltage-dependent capacitor. The acronym MOS is used even if the top electrode is not a metal and the insulator is not an oxide. An MOS capacitor is a very useful device both for evaluating the MOS integrated circuit (IC)–fabrication process and for predicting the MOS transistor performance. Therefore, MOS capacitors are included in the test chip for IC process and device characterization.
The MOS capacitor systems have been the subject of numerous investigations and ...
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